Effects of vacuum ultraviolet irradiation on trapped charges and leakage currents of low-k organosilicate dielectrics
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چکیده
Articles you may be interested in Effect of vacuum-ultraviolet irradiation on the dielectric constant of low-k organosilicate dielectrics Appl. Bandgap measurements of low-k porous organosilicate dielectrics using vacuum ultraviolet irradiation Appl. The effects of plasma exposure and vacuum ultraviolet irradiation on photopatternable low-k dielectric materials Effect of vacuum ultraviolet and ultraviolet irradiation on mobile charges in the bandgap of low-k-porous organosilicate dielectrics High quality atomic-layer-deposited ultrathin Si-nitride gate dielectrics with low density of interface and bulk traps Appl.
منابع مشابه
Defect-induced bandgap narrowing in low-k dielectrics
Articles you may be interested in Effects of vacuum ultraviolet irradiation on trapped charges and leakage currents of low-k organosilicate dielectrics Appl. Bandgap measurements of low-k porous organosilicate dielectrics using vacuum ultraviolet irradiation Appl. Influence of electron-beam and ultraviolet treatments on low-k porous dielectrics
متن کاملLETTERS Effect of vacuum ultraviolet and ultraviolet irradiation on mobile charges in the bandgap of low-k-porous organosilicate dielectrics
Capacitance-voltage C-V measurements are used to determine the effect of vacuum ultraviolet VUV and ultraviolet irradiation on mobile charges in porous low-k organosilicate SiCOH dielectrics. Hysteresis in the C-V characteristics shows that VUV irradiation increases the number of mobile charges in the dielectric. This is because VUV photons excite the trapped electrons from defect states to mak...
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Articles you may be interested in Effect of vacuum-ultraviolet irradiation on the dielectric constant of low-k organosilicate dielectrics Appl. Effects of plasma and vacuum-ultraviolet exposure on the mechanical properties of low-k porous organosilicate glass J. Bandgap measurements of low-k porous organosilicate dielectrics using vacuum ultraviolet irradiation Appl. The effects of plasma expos...
متن کاملEffect of the dielectric–substrate interface on charge accumulation from vacuum ultraviolet irradiation of low-k porous organosilicate dielectrics
a r t i c l e i n f o Keywords: Vacuum ultraviolet irradiation Low-k dielectrics Charge accumulation Dielectric–substrate interface We compare the effect of various dielectric–substrate interfaces on charge accumulation during vacuum ultraviolet irradiation of capped low-k porous organosilicates to find that more charges are trapped in a dielectric stack deposited on silicon compared with the s...
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